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  ±Û¾´ÀÌ : srsjsrsj   °íÀ¯ID : srsjsrsj     ³¯Â¥ : 08-12-02 00:16     Á¶È¸ : 5881    
¾È³çÇϼ¼¿ä. ´Ã ÁÁÀº Á¤º¸·Î ¸¹Àº µµ¿ò ¹Þ°í ÀÖ½À´Ï´Ù.
 
 
 
 
 
N2 °¡ 1000 LPM ¿¡
 
SF6 ¸¦ 500 / 1000 / 1500 / 2000 LPM À» FLOW ½Ãų ¶§
 
È­ÇÐÀû ¹ÝÀÀ¿¡ ÀÇÇÑ »ý¼ººÎ»ê¹°¿¡ ´ëÇØ ¾Ë°í½Í½À´Ï´Ù. (¸î PPMÁ¤µµ°¡ µÇ´ÂÁö...)
 
 
SF6 + CH4 + O2 + N2 ¤Ñ> ????
 
 
HF + CO + CO2 + NO + NO2 + SO2 + SO2F2 + SOF2 µîÀÌ »ý±æ°Í °°Àºµ¥..
 
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½ºÅ×Æijë Stefano   08-12-06 21:06
SF6¿Í Áú¼Ò´Â ¹ÝÀÀÇÏÁö ¾ÊÀ» °ÍÀÌ°í
SF6¸¦ º¸Á¶¿¬·á CH4¿Í ¿¬¼Ò¿ë°ø±â¸¦ »ç¿ëÇÏ¿© °í¿ÂÀ¸·Î ¼Ò°¢ÇÑ´Ù¸é
ÁÖ·Î (1)½Ä°ú °°Àº ¹ÝÀÀÀÌ ÀϾ°ÚÁö¸¸ ¿¬¼Ò(¼Ò°¢)¿Âµµ¿Í ¸ôºñ¿¡ µû¶ó (2)¿Í °°Àº ¹°Áúµµ »ý¼ºµÉ ¼ö ÀÖÀ» °ÍÀÔ´Ï´Ù 

SF6 + O2 --->SO2 + 3F2
2CH4 + 3F2-->6HF + C2H2
C2H2+2.5O2---->2CO2+H2O
-----------------------------------------
SF6 + 2CH4 + 3.5O2 (+N2) --->  SO2 + 2CO2+ 6HF+ H2O  ....(1) ÁÖ¼ººÐ »ý¼º¹°

SO2 + O2-->SO3
CH4+O2-->C+2H2O
CH4+O2-->CO + 2H2
2H2+O2-->2H2O
6HF+O2---->3F2+3H2O
N2+O2----->NO, NO2, N2O3, N2O4, N2O5
-----------------------------------------------------------
--> SO3 + CO + F2 + NO + NO2 + N2O3 + ... (2) ºÎ¼ººÐ »ý¼º¹°
   

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