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D. Drews, W. Noell, W. Ehrfeld, M. Lacher, K. Mayr, O. Marti, C. Serwatzy, and M.
Abraham, "Micromachined aperture probe for combined atomic force and near-field
scanning optical microscopy (AFM/NSOM).," presented at the Materials and Device
Characterization in Micromachining, Santa Clara, CA, USA, 21- 2 Sept, 1998 (unpublished).

A novel concept for the realization of a multifunctional scanning probe designed
for simultaneous atomic force microscopy and near-field scanning  optical microscopy
Measurements is described.
It is based on micromachining and thin film technology and includes the fabrication
of a cantilever, an integrated optical waveguide, an aperture probe tip, and the integration
of all components into the complete sensor. Key processes are the fabrication of the probe
providing a sharp tip together with a small optical aperture and the coupling of light from
the integrated optical waveguide into the probe
tip. The aperture probe consists of a transparent silicon nitride cone covered with aluminum except
for the sharp cone tip thus forming a circular aperture around the protruding tip apex.
In order to couple light from the waveguide into the tip a simple structure has been
developed and optimized using numerical simulation procedures for the electromagnetic field
distribution in the coupling structure.
The complete sensor is fabricated in a reliable batch process and experimental evidence for the
validity of the coupling concept is given.
   

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