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  etching, ablation, abrasion을 구분해주세요..^^
  글쓴이 : 김경수   고유ID : 김경수     날짜 : 00-00-00 00:00     조회 : 6382    
흠..논문을 보다보면 (Thin film - CVD) etching, ablation, abrasion의 용어가 나옵니다..

아는 상식으로는 도저히 구분하질 못하겠네요..^^

거의 비슷하게 해석을 하는 것 같아서요..

어디서든 이것을 구분하지 않는 것 같기도 하구요..

부탁드립니다..

김경수 김경수   39-08-02 00:00
답변 감사합니다..^^
abrasion에 대한 것은 확실히 구분이 됩니다..
하지만 etching과 ablation에서 액상과 기상으로 구분하는 것 같아서 다시 질문 드리겠습니다..
물론 etching은 주로 액상에서 진행하지만 기상에서도 진행 (dry etching)됩니다..
기상 (플라즈마 증착 공정 등)에서 막의 표면 조도 (roughness)의 변화는 입자들의물리적 충돌에 의한 변화도 생기겠지만, etching에 의하여 변화하기도 한다고 들었습니다.
그때 논문에서 봤었는데..(하도 오래전이라서여..^^) ablation과 etching은 막을 제거하는 특성 (mechanism이라고 해야할지 모르겠네여..막 제거 현상이라고 하는 것도 괜찮겠네요..)이 다르다고 들었습니다..
이에 대한 구분이 명확하지 않아서 그럽니다..^^
이에 대한 답변을 해주신다면 감사하겠습니다..^^
Stefano Stefano   39-08-02 00:00
(0) 필자는 반도체 제조공장에 근무한 적은 없지만 반도체와 반도체 제조공정에서 사용되는 CVD, Potosensitive Polymers, 그리고 처리공정에 관심이 많아 조사한 적이 있습니다. 반도체 제조공정은 화학/재료/전자/금속/환경/로보틱스/등등 첨단기술이 모두 동원되고 있음을 알 수 있습니다.

(1) 고집적도의 반도체 제조공정은 Silicon 단결정을 만든후 이를 얇고 표면이 매끄러운 Disc (Silicon Wafer)형태로 만든다음 여기에 아주작은 무수한 p-형반도체 n-형 반도체를 평면에 만들어두고 절연체와 격리시키고 금속 도체로 단자를 끌어내는 것이 핵심이며 이를 위해 아주 복잡한 과정의 연속으로 되어있습니다.

(2) 반도체 제조공정은 주로 Silicon Wafer 표면의 미세한 구조의 "특정부분"만을 처리하기 위해 Photo-sensitive 고분자를 도포한 후 Lithography로 감광시키고 현상한 다음 노출된 부분만을 "특수처리"하는 과정의 반복으로 구성되어 있습니다. 

여기서 "처리"의 의미는 산화/용해/제거/이온 Implantation/Doping/Deposition/분해/등의 여러 가지 과정중의 하나를 의미합니다.

(3) 질문에서 사용하는 용어에 대한 정확한 정의는 (4)항에서 소개하는 싸이트에서 찾아보도록 하세요.  여기서는 개략적으로 답변합니다.

감광성물질(고분자)도포>Pattern 노광(Exposure)>현상(Development)>CVD 도포, 에칭(Etching)또는 이온침투(Ion Implantation)>도포물질, 또는 표면피막 제거(Ablation)>....등의 과정이 여러차례(6~10회?) 반복되는데

Etching은 화학물질 혹은 Plasma 등으로 보호되지 않은 표면과 반응(부식)시켜 녹여내거나 피막을 형성하거나 표면물질을 제거하는 과정을 말하며 주로 액상에서 이루어집니다.
 
Ablation은 표면의 산화피막이나 고분자 물질 등을 증발, 산화, 프라스마 등의 방법으로 기상으로 제거하는 과정을, 그리고

Abrasion은 표면처리시 연마제 슬러리 등을 이용해서 매끄럽게 하거나 표면의 이물질을 제거하는 과정을 언급합니다. 

(4) 반도체 제조공정의 원리에 대해 자세하게 설명한 Site는 아래에서 찾아보세요. 아주 잘되어 있습니다. 

http://electronics.howstuffworks.com/framed.htm?parent=diode.htm&url=http://www.leb.e-technik.uni-erlangen.de/lehre/mm/html/start.htm
Stefano Stefano   39-08-02 00:00
(1) Etching은 주로 액상에서 보호되지 않은(감광성 고분자에 이미지를 노출시켜 현상했을 때 보호막이 없어진) 특정부위만을 반응(부식)시켜 녹여내는 것을 원래 의미하나..

같은 목적으로 기상(프라즈마)에서 반응처리 하는 것도 Ethching이라고 부르고..

(2) Ablation은 Etching, Ion Implantation등을 마치고 남아있는 고분자 보호막이나 질화규소 산화규소 등을 주로 기상으로 제거하는 과정을 언급하는 것으로 봅니다.

(3) 소개된 싸이트에서는 Ablation이라는 어려운 단어 사용을 피하고 있으므로 전문 서적에서 어느 물질을 어느 Phase에서 선택적 혹은 비 선택적으로 제거하는지를 찾아보도록 하세요. 
김경수 김경수   39-08-02 00:00
답변 감사합니다..^^;;
Bradley    15-08-08 12:46
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