(1) <ÀÏÁ¤½Ã°£µ¿¾È ¾Ð·Â º¯È·ÎºÎÅÍ °ø±â ´©¼³·®À» °è»êÇÏ´Â ¹æ¹ý>
System Volume (»ó¼ö) : V
Absolute Temperature(»ó¼ö): T
Vacuum Duration Time: t (´©¼³Áö¼Ó½Ã°£)
Absolute Pressure Change: Initial, Final : P1, P2
Molecular Mass of Air: MW= 28.96 mole-1
´©¼³·® °è»ê¹æ¹ý PV = n R T¸¦ ½Ã°£ t·Î ¹ÌºÐ ==> V* (¥ÄP/¥Ät) = R*T*(¥Än/¥Ät) ....(1)
½Ã°£¿¡µû¸¥ ¾Ð·Âº¯È(¥ÄP/¥Ät)¸¦ ÀÌ¿ëÇÏ¿© ½Ã°£¿¡ µû¸¥ ¸ô¼öº¯È(¥Än/¥Ät)¸¦ °è»ê. Áï
(¥Än/¥Ät) = (V/RT)*(¥ÄP/¥Ät) ..........................(2) À̷κÎÅÍ °ø±â Áú·®À¯·®À¸·Î ȯ»êÇÏ·Á¸é ºÐÀÚ·®À» °öÇÏ¸é µÊ
°ø±âÀ¯·®, (M)air = (MW)*(¥Än/¥Ät) = (MW)*(V/RT)*(¥ÄP/¥Ät) ....................................(3)
*Âü°í*
»ç¿ëÇÏ´Â ´ÜÀ§´Â ÀÓÀÇ ´ÜÀ§¸¦ ¸ðµÎ »ç¿ëÇصµ µÇÁö¸¸ ´ÜÀ§¿¡ µû¶ó R°ªÀÌ ´Þ¶óÁö°í ¿Âµµ¿Í ¾Ð·Â´Â ¹Ýµå½Ã Àý´ë¾Ð·ÂÀ» »ç¿ëÇÏ¿© °è»ê; ¾Æ·¡ÀÇ »ç¿ë´ÜÀ§¿¡ µû¸¥ R °ªÀ» »ç¿ëÇÏ¸é µË´Ï´Ù.
R = P*V/(nT) = 1013.25 mbar*22.414 m3/1kg-mole-273.15K =83.145 mbar-m3/kg-mole-K
R = 760 torr* 22.414 m3/1kg-mole-273.15K = 62.364 torr-m3/kg-mole-K
R = 1.033227 kgf/cm2-22.414 m3/1kg-mole-273.15K = 0.084784 kgf/cm2-m3/kg-mole-K
*ÁÖÀÇ*
À§ÀÇ ¹æ¹ýÀ¸·Î °è»êµÈ °ø±â ´©¼³·®Àº ÃøÁ¤Àý´ë¿Â T¿¡¼ÀÇ À¯·®À¸·Î °è»êµË´Ï´Ù. ¿Âµµ°¡ ´Þ¶óÁö¸é ´Ù¸¥ ´©¼³À¯·®°ªÀÌ °è»êµÊ¿¡ À¯ÀÇ Çϼ¼¿ä.
(2) <L-torr/min ȤÀº m3-mbar/min ´ÜÀ§·Î °è»êµÈ °æ¿ìÀÇ ´©¼³·® ȯ»ê>
°£È¤ ´©¼³·®ÀÌ L-torr/min ȤÀº m3-mbar/min µî°ú °°ÀÌ ºÎÇÇ*¾Ð·Â °ªÀ¸·Î ÁÖ¾îÁø °æ¿ì°¡ Àִµ¥ À̸¦ °ø±âÀ¯·®À¸·Î ȯ»êÇÏ´Â ¹æ¹ýµµ (1)½Ä°ú À¯»çÇÏ°Ô °è»êÇÏ¸é µË´Ï´Ù. »ç¿ë´ÜÀ§µµ µ¿ÀÏÇÕ´Ï´Ù.
PV = n R T¸¦ ½Ã°£ t·Î ¹ÌºÐ ==> (¥ÄPV/¥Ät) = R*T*(¥Än/¥Ät) ..........(1a)
´©¼³°ø±â ¸ôÀ¯·® (¥Än/¥Ät) = (1/RT)*(¥ÄPV/¥Ät) ...............................................(2a)
´©¼³°ø±â Áú·®À¯·®, (M)air = (MW)*(¥Än/¥Ät) = (MW)*(1/RT)*(¥ÄPV/¥Ät) ........(3a)
(3) <System Evacuation(Priming) TimeÀ¸·ÎºÎÅÍ °è»êÇÏ´Â ¹æ¹ý >
ºÎÇÇV ¸¦ ¾Ë°í ÀÖ´Â System¿¡¼ 펖ÇÁºÎÇÇÀ¯·® vp¸¦ ¾Ë°íÀÖ´Â ÆßÇÁ¸¦ »ç¿ëÇÏ¿© Àý´ë¾Ð·ÂÀ» P1¿¡¼ P2·Î ¶³¾î ¶ß¸®´Âµ¥ ¼Ò¿äµÇ´Â ½Ã°£ t·ÎºÎÅÍ ´©¼³·® nlÀÇ °è»ê
½Ã½ºÅÛ´©¼³ ¸ô À¯·® nl - ÆßÇÁ¹èÃâ ¸ôÀ¯·® np = ½Ã½ºÅÛ³» ¸ô¼ö°¨¼Ò¼Óµµ dN/dt ...(4) <---¹°Áú¼öÁö
ÆßÇÁ ¹èÃâ ¸ôÀ¯·® -np = P*vp/(RT); ½Ã½ºÅÛ³» ¸ô¼ö °¨¼Ò¼Óµµ dN/dt = V/(RT)*dP/dt
vp=ÆßÇÁ ºÎÇÇÀ¯·®
nl - P*vp/(RT)=V/(RT)*dP/dt ==> dt = V/(RT)*dP/{nl -P*vp/(RT)} .............(5)
0~t ÀûºÐ. P1~P2±îÁö ³»·Á°¡´Âµ¥ ¼Ò¿äµÇ´Â ½Ã°£t¸¦ °è»ê
t = (V/(RT)*(RT)/vp * ln [{nl-P1*vp/(RT)}/{nl-P2*vp/(RT)} = (V/vp) ln [{nl-P1*vp/(RT)}/{nl-P2*vp/(RT)}]
(vp/V)*t = ln [{nl-P1*vp/(RT)}/{nl-P2*vp/(RT)}]
{nl-P1*vp/(RT)}/{nl-P2*vp/(RT)} = exp (vp*t/V) À̽ÄÀ¸·ÎºÎÅÍ ½Ã½ºÅÛ ´©¼³À¯·® nlÀ» °è»ê:
½Ã½ºÅÛ ´©¼³¸ô À¯·® nl = vp/(RT) * (P1 - ¥á*P2)/(1 - ¥á); ¥á = exp(vp*t/V) ......(6)
½Ã½ºÅÛ ´©¼³ °ø±âÁú·®À¯·® (M)air = nl * (MW)air ..............................................(7)